Title: BS EN ISO 14644-3 1 BS EN ISO 14644-3 • Cleanrooms associated controlled environments- • Part 3 • Metrology and test methods DIS 2 BS EN ISO 14644-3Metrology Test Methods • Current Status • 1. DIS was issued by ISO in September 02 • 2. UK comments to BSI to be made by end December 02 • 3.
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LBI/30 will consider all UK comments by end January 03 • 4. BSI vote to CEN/ISO by end February 03 • 5. DIS is valid and can be referred to and used until it is superseded.
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